PM-100 Plasma Cleaner

The PM-100 Advantage

The PM-100 from Vacuum Sciences is the new standard for in-situ plasma cleaning of scanning electron microscopes (SEMs), dual beam systems (FIBs), and related applications
The fully-integrated PM-100 uses proprietary technologies, including high-efficiency RF power amplifier and plasma excitation techniques for reliable ignition
Engineered for optimal generation of reactive species for better performance and higher reliability
PM-100 represents a revolutionary improvement over any other plasma cleaners on the market- which are nearly identical in outdated technology, non-optimized performance, and high costs
Most importantly, the PM-100 outperforms competing products at less than half their price

Self-contained design, no external electronics or bulky cables to route
Requires only DC power and USB communications
Full integration results in fewer components, driving costs down
Expert plasma design allows simple operation and reliable ignition under all conditions: nothing to adjust, just set recipe and run

Operates from 24VDC/4A (from chassis or external power supply), 1.2 A typical @20W RF
Status provided by tri-color LED status indicator and software messages
USB communications, no conversion dongle needed (RS-232 option for OEMs)
Control using GUI interface or via extensive command set

Simple to use: Set recipe and then select push to start button - that's it
Automated port detection for quick and easy communications with the PM100 system
Monitors unit status and activity, real-time indicators and graphs of system parameters
Comprehensive logging of operations and settings, stored on both unit and host CPU
Password-protected service/engineering section for advanced information and adjustments

Uses proprietary technology to ensure reliable plasma ignition
Designed to ignite plasmas at difficult low pressures (5-25 mTorr)
Avoids use of unreliable methods (pressure bursts, flow constrictions) to ignite plasma
Open-bore plasma design maximizes delivery of reactive species

High efficiency, proprietary switch-mode RF amplifier, minimizes power consumption and waste heat
Output powers > 75 W and DC-to-RF efficiencies >75%
Sufficient power to saturate plasma volume, achieve highest levels of cleaning efficiency

32-bit 120 MHz Arm® Cortex®-M4 core with 2MB flash and 640k SRAM with true multi-threaded processing
Logs last 100 cleaning operations in flash memory
User-accessible flash memory storage (100 x 64 bytes)
Extensible command set (OEM only)

Each system includes: